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Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren für Mikroroboter / Lehr, H.; Abel, S.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulu, c.; Thürigen, C.

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Metadaten
Author:Klaus-Peter Kämper, H. Lehr, S. Abel, J. Döpper
ISBN:0277-786X
Parent Title (English):Proceedings of the SPIE - The International Society for Optical Engineering
Document Type:Article
Language:English
Year of Completion:1996
Date of the Publication (Server):2012/12/18
First Page:202
Last Page:210
Note:
Konferenz-Einzelbericht.
Link:http://dx.doi.org/10.1117/12.260624
Zugriffsart:bezahl
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik