Biochemical sensors with structured and porous silicon capacitors
| Author: | H. Lüth, M. Thust, A. Steffen, P. Kordos, Michael Josef SchöningORCiD |
|---|---|
| ISBN: | 0921-5107 |
| Parent Title (English): | Materials Science and Engineering B. 69-70 (2000) |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2000 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 104 |
| Last Page: | 108 |
| Link: | http://dx.doi.org/10.1016/S0921-5107(99)00275-5 |
| Zugriffsart: | campus |
| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| FH Aachen / INB - Institut für Nano- und Biotechnologien |
