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Reduction of geometric taper losses in the PCVD process. Geittner, P.; Hagemann, H. J.; Warnier, J.; Weling, F.; Wilson, H.

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Metadaten
Author:Hans-Jürgen Hagemann, P. Geittner, J. Warnier, F. Weling
ISBN:0013-5194
Parent Title (English):Electronics letters : an intern. publication / The Institution of Electrical Engineers. 21 (1985), H. 13
Document Type:Article
Language:English
Year of Completion:1985
Date of the Publication (Server):2012/12/18
First Page:870
Last Page:871
Link:http://dx.doi.org/10.1049/el:19850614
Zugriffsart:bezahl
Institutes:FH Aachen / Fachbereich Elektrotechnik und Informationstechnik