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Improved conductivity-measurement of semiconductor epitaxial layers by means of the contactless microwave method

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Metadaten
Author:Horst Schäfer, P. Boege, Xu Shanjia, Wu (u.a.) Xinzhang
ISBN:0-8194-1558-8
Parent Title (English):Conference digest : 10 - 14 January 1994, San Diego, California / International Conference on Millimeter and Submillimeter Waves and Applications / Mohammed N. Afsar, chair/ed.
Publisher:SPIE
Place of publication:Bellingham, Wash.
Document Type:Article
Language:English
Year of Completion:1994
Date of the Publication (Server):2012/12/18
Length:LXXX, 628 S. : graph. Darst.
First Page:649
Last Page:658
Note:
Serie Proceedings / SPIE, The International Society for Optical Engineering ; 2250
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik