The Virtual Clean Room - a new tool in teaching MST process technologies
- The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.
| Author: | Klaus-Peter Kämper, Antoni Picard, Manfred Brill, Detlev Cassel, Andreas Jentsch, Sabine Merten, Markus Rollwa |
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| DOI: | https://doi.org/10.21269/86 |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2003 |
| Publishing Institution: | Fachhochschule Aachen |
| Contributing Corporation: | FH Kaiserslautern/Zweibrücken |
| Tag: | MST virtual clean room |
| GND Keyword: | Virtuelle Maschine; VM; Mikrosystemtechnik |
| Source: | mst news International newsletter on micro - nano Integration(2003), H. |
| Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |
| Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten |
