Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique
- A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.
| Author: | Johannes Platen, Arshak PoghossianORCiD, Michael Josef SchöningORCiD |
|---|---|
| URN: | urn:nbn:de:hbz:a96-opus-1477 |
| DOI: | https://doi.org/10.21269/117 |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2006 |
| Publishing Institution: | Fachhochschule Aachen |
| Contributing Corporation: | International Symposium on Sensor Science, I3S 2005 <3; 2005; Juelich, Germany> |
| Tag: | Nanostructuring; layer expansion; pattern-size reduction; self-aligned patterning |
| GND Keyword: | Biosensor |
| Source: | http://www.mdpi.org/sensors/papers/s6040361.pdf |
| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| FH Aachen / INB - Institut für Nano- und Biotechnologien | |
| Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 57 Biowissenschaften; Biologie / 570 Biowissenschaften; Biologie |
| collections: | FH Aachen / International Symposium on Sensor Science, I3S 2005 <3; 2005; Ju |
