High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater materials
- Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing nondispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements.
| Author: | Jan Spannhake, Olaf Schulz, Andreas Helwig, Angelika Krenkow, Gerhard Müller, Theodor Doll |
|---|---|
| URN: | urn:nbn:de:hbz:a96-opus-1513 |
| DOI: | https://doi.org/10.21269/121 |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2006 |
| Publishing Institution: | Fachhochschule Aachen |
| Contributing Corporation: | International Symposium on Sensor Science, I3S 2005 <3; 2005; Juelich, Germany> |
| Tag: | Hotplate; antimony doped tin oxide; doped metal oxide; doped silicon; electro-migration; heater metallisation; high-temperature stability |
| GND Keyword: | Biosensor |
| Source: | http://www.mdpi.org/sensors/papers/s6040405.pdf |
| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 57 Biowissenschaften; Biologie / 570 Biowissenschaften; Biologie |
| collections: | FH Aachen / International Symposium on Sensor Science, I3S 2005 <3; 2005; Ju |
