Micro- and nanopatterning of sensor chips by means of macroporous silicon.

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Metadaten
Author:A. Kurowski, J. Schultze, H. Lüth, Michael Josef SchöningORCiD
ISBN:0925-4005
Parent Title (English):Sensors and Actuators B. 83 (2002), H. 1-3
Document Type:Article
Language:English
Year of Completion:2002
Date of the Publication (Server):2012/12/18
First Page:123
Last Page:128
Note:
Selected Papers from TRANSDUCERS '01 EUROSENSORS XV
Link:http://dx.doi.org/10.1016/S0925-4005(01)01054-1
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien