Micro- and nanopatterning of sensor chips by means of macroporous silicon
| Author: | A. Kurowski, J.W. Schultze, H. Lüth, Michael Josef SchöningORCiD |
|---|---|
| ISBN: | 3-540-42150-5 |
| Parent Title (English): | Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.) |
| Publisher: | Springer |
| Place of publication: | Berlin [u.a.] |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2001 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 640 |
| Last Page: | 643 |
| Note: | Eurosensors (15, 2001, München) ; International Conference on Solid State Sensors and Actuators (11, 2001, München) |
| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| FH Aachen / INB - Institut für Nano- und Biotechnologien |
