Micro- and nanopatterning of sensor chips by means of macroporous silicon
Author: | A. Kurowski, J.W. Schultze, H. Lüth, Michael Josef SchöningORCiD |
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ISBN: | 3-540-42150-5 |
Parent Title (English): | Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.) |
Publisher: | Springer |
Place of publication: | Berlin [u.a.] |
Document Type: | Article |
Language: | English |
Year of Completion: | 2001 |
First Page: | 640 |
Last Page: | 643 |
Note: | Eurosensors (15, 2001, München) ; International Conference on Solid State Sensors and Actuators (11, 2001, München) |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |