PCVD at high deposition rates. Geittner, P.; Hagemann, H. J.; Warnier, J.; Wilson, H.
Author: | Hans-Jürgen Hagemann, P. Geittner, J. Warnier, H. Wilson |
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ISBN: | 0733-8724 |
Parent Title (English): | Journal of Lightwave Technology (J-LT) / Institute of Electrical and Electronics Engineers (IEEE). 4 (1986), H. 7 |
Document Type: | Article |
Language: | English |
Year of Completion: | 1986 |
First Page: | 818 |
Last Page: | 822 |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |