Preparation of patterned GaAs structures for MEMS and MOEMS. Cambel, V.; Kicin, S.; Kuliffayová, M.; Kovácová, E.; Novák, J.; Kostic, I.; Förster, A.

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Metadaten
Author:Arnold Förster, V. Cambel, S. Kicin, M. Kuliffayová
ISBN:0928-4931
Parent Title (English):Materials Science and Engineering: C. 19 (2002), H. 2
Document Type:Article
Language:English
Year of Completion:2002
Date of the Publication (Server):2012/12/18
First Page:161
Last Page:165
Link:http://dx.doi.org/10.1016/S0928-4931(01)00476-3
Zugriffsart:bezahl
Institutes:FH Aachen / Fachbereich Energietechnik