Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy
Author: | Arnold Förster, J. M. Layet, H. Lüth |
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ISBN: | 0169-4332 |
Parent Title (English): | Applied Surface Science. 41 - 42 (1989) |
Document Type: | Article |
Language: | English |
Year of Completion: | 1989 |
First Page: | 306 |
Last Page: | 311 |
Note: | ISSN der E-Ausg.: 0169-4332 |
Link: | http://dx.doi.org/10.1016/0169-4332(89)90076-7 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Energietechnik |