Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy

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Metadaten
Author:Arnold Förster, J. M. Layet, H. Lüth
ISBN:0169-4332
Parent Title (English):Applied Surface Science. 41 - 42 (1989)
Document Type:Article
Language:English
Year of Completion:1989
Date of the Publication (Server):2012/12/18
First Page:306
Last Page:311
Note:
ISSN der E-Ausg.: 0169-4332
Link:http://dx.doi.org/10.1016/0169-4332(89)90076-7
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Energietechnik