Surface reactions of trimethylgallium and trimethylarsenic on silicon surfaces
Author: | Arnold Förster, H. Lüth |
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ISBN: | 1071-1023 |
Parent Title (English): | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 7 (1989), H. 4 |
Document Type: | Article |
Language: | English |
Year of Completion: | 1989 |
First Page: | 720 |
Last Page: | 724 |
Note: | ISSN der E-Ausg.: 0734-211X |
Link: | http://dx.doi.org/10.1116/1.584632 |
Zugriffsart: | bezahl |
Institutes: | FH Aachen / Fachbereich Energietechnik |