LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M.
MetadatenAuthor: | Klaus-Peter Kämper, H. Lehr, W. Ehrfeld, F. Michel |
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ISBN: | 0780321146 |
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Parent Title (English): | 1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN |
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Place of publication: | Piscataway, N.J. |
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Document Type: | Article |
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Language: | English |
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Year of Completion: | 1994 |
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Length: | 477 S : Ill. |
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First Page: | 43 |
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Last Page: | 47 |
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Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |
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