Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.
MetadatenAuthor: | Klaus-Peter Kämper, J. Döpper, W. Ehrfeld, B. Hagemann |
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ISBN: | 1-85312-390-0 |
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Parent Title (English): | Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey |
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Publisher: | Computational Mechanics Publ. |
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Place of publication: | Southampton [u.a.] |
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Document Type: | Article |
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Language: | English |
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Year of Completion: | 1995 |
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Length: | 337 S : Ill., graph. Darst. |
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First Page: | 3 |
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Last Page: | 10 |
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Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |
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