Self-aligned nanogaps and nanochannels via conventional photolithography and pattern-size reduction technique
Author: | Heiko Spelthahn, Arshak PoghossianORCiD, Michael Josef SchöningORCiD |
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ISBN: | 0013-4686 |
Parent Title (English): | Electrochimica Acta. 54 (2009), H. 25 Sp. Iss. SI |
Document Type: | Article |
Language: | English |
Year of Completion: | 2009 |
First Page: | 6010 |
Last Page: | 6014 |
Link: | http://dx.doi.org/10.1016/j.electacta.2009.03.029 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |