Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; Kügeler, C. ; Roelofs, A. ; Böttger, U. ; Waser, R. ; Schmitz-Kempen,
| Author: | Klaus Prume, Peter Gerber, Carsten Kügeler, Andreas Roelofs |
|---|---|
| ISBN: | 0-7803-8410-5 |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2004 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 7 |
| Last Page: | 10 |
| Note: | 14th IEEE International Symposium on Applications of Ferroelectrics, 2004. ISAF-04. 2004 |
| Link: | http://dx.doi.org/10.1109/ISAF.2004.1418325 |
| Zugriffsart: | campus |
| Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
