The Virtual Cleanroom – a new tool in teaching MST process technologies
Author: | Klaus-Peter Kämper, Antoni Picard, Manfred Brill, Detlev Cassel, Andreas Jentsch, Sabine Merten, Markus Rollwa |
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ISBN: | 0948-3128 |
Parent Title (English): | mst news International newsletter on micro - nano Integration (2003) |
Document Type: | Article |
Language: | English |
Year of Completion: | 2003 |
First Page: | 35 |
Last Page: | 36 |
Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |