A semiconductor-based field-effect platform for (bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices
| Author: | Michael Josef SchöningORCiD, Maryam H. Abouzar, Torsten WagnerORCiD, Niko Näther, David Rolka, Tatsuo Yoshinobu, Joachim P. Kloock, Monika Turek, Sven Ingebrandt, Arshak PoghossianORCiD |
|---|---|
| DOI: | https://doi.org/10.1557/PROC-0952-F08-02 |
| Parent Title (English): | MRS Proceedings |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2006 |
| First Page: | 1 |
| Last Page: | 9 |
| Note: | Vol. 952 - Symposium F - Integrated Nanosensors |
| Zugriffsart: | bezahl |
| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| FH Aachen / INB - Institut für Nano- und Biotechnologien |
