Implication of the light polarisation for UV curing of pre-patterned resists
| Author: | M. Wissen, N. Bogdanski, H.-C. Scheer, Andreas Bitz, G. Ahrens, G. Gruetzner |
|---|---|
| DOI: | https://doi.org/10.1016/j.mee.2004.12.099 |
| ISSN: | 0167-9317 |
| Parent Title (English): | Microelectronic Engineering |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2005 |
| Volume: | 78-79 |
| First Page: | 659 |
| Last Page: | 664 |
| Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
