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Author
Iken, Heiko
(14)
Schöning, Michael Josef
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Keusgen, Michael
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Molinnus, Denise
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Poghossian, Arshak
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Wagner, Patrick
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INB - Institut für Nano- und Biotechnologien
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atomic layer deposition
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capacitive field-effect sensors
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pH sensors
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ultrathin gate insulators
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Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors
(2013)
Iken, Heiko
;
Ahlborn, Kristina
;
Gerlach, Frank
;
Vonau, Winfried
;
Zander, Wilhelm
;
Schubert, Jürgen P.
;
Schöning, Michael Josef
14
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