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Abel, S.
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Döpper, J.
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Kämper, Klaus-Peter
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Lehr, H.
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1996 (1)
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Fachbereich Maschinenbau und Mechatronik
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Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren für Mikroroboter / Lehr, H.; Abel, S.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulu, c.; Thürigen, C.
(1996)
Kämper, Klaus-Peter
;
Lehr, H.
;
Abel, S.
;
Döpper, J.
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