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H. Lehr (1)
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Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren für Mikroroboter / Lehr, H.; Abel, S.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulu, c.; Thürigen, C.
(1996)
Klaus-Peter Kämper
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H. Lehr
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S. Abel
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J. Döpper
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