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Author
Prume, Klaus
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Waser, Rainer
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Franken, Klaus
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Roelofs, A.
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Booij, W. E.
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Calame, F.
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Maier, Horst R.
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Raeder, H.
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Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; Kügeler, C. ; Roelofs, A. ; Böttger, U. ; Waser, R. ; Schmitz-Kempen,
(2004)
Prume, Klaus
;
Gerber, Peter
;
Kügeler, Carsten
;
Roelofs, Andreas
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