Refine
Institute
Language
- German (24) (remove)
Document Type
- Article (21)
- Conference Proceeding (2)
- Lecture (1)
Keywords
- Mikrosystemtechnik (2)
- Virtuelle Sensor-Fertigung (2)
- Fertigungsprozess (1)
- LabVIEW (1)
- Mikrotechnik (1)
- Oxidationsofen (1)
- Oxidschicht (1)
- Photolithographie (1)
- VM (1)
- Virtuelle Maschine (1)
- manufacturing process (1)
- micro technology (1)
- micro-technical components (1)
- mikrotechnische Komponenten (1)
- multimediale Lernsoftware (1)
- oxidation furnace (1)
- oxide coating (1)
- virtual (1)
- virtual fabrication of a microsensor (1)
- virtual machines (1)
- virtual sensor fabrication (1)
- virtuelle Maschinen (1)
Zugriffsart
- weltweit (1)