Refine
Institute
Document Type
- Article (8)
- Conference Proceeding (2)
Keywords
- Mikrosystemtechnik (2)
- VM (2)
- Virtuelle Maschine (2)
- Virtuelle Sensor-Fertigung (2)
- Fertigungsprozess (1)
- LabVIEW (1)
- MST (1)
- Mikrotechnik (1)
- Oxidationsofen (1)
- Oxidschicht (1)
- Photolithographie (1)
- manufacturing process (1)
- micro technology (1)
- micro-technical components (1)
- mikrotechnische Komponenten (1)
- multimediale Lernsoftware (1)
- oxidation furnace (1)
- oxide coating (1)
- virtual (1)
- virtual clean room (1)
- virtual fabrication of a microsensor (1)
- virtual machines (1)
- virtual sensor fabrication (1)
- virtuelle Maschinen (1)