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Author
Cambel, V.
(2)
Förster, Arnold
(2)
Kicin, S
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Kicin, S.
(1)
Kuliffayova, M.
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Kuliffayová, M.
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2002
(2)
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Fachbereich Energietechnik
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Fabrication of GaAs symmetric pyramidal mesas prepared by wet-chemical etching using AlAs interlayer. Kicin, S.; Cambel, V.; Kuliffayova, M.; Gregusova, D.; Kovacova, E.; Novak, J.; Kostic, I.; Forster, A.
(2002)
Förster, Arnold
;
Kicin, S
;
Cambel, V.
;
Kuliffayova, M.
Preparation of patterned GaAs structures for MEMS and MOEMS. Cambel, V.; Kicin, S.; Kuliffayová, M.; Kovácová, E.; Novák, J.; Kostic, I.; Förster, A.
(2002)
Förster, Arnold
;
Cambel, V.
;
Kicin, S.
;
Kuliffayová, M.
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