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Author
Frank Hartung
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Klaus Prume
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Markus Kampmann
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Alexander Ferrein
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Holger Heuermann
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Uwe Horn
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Andreas Bitz
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F. Calame
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F. Tyholdt
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Gerhard Lakemeyer
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H. Raeder
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Jörg Huschke
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W. E. Booij
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A. El Ouardi
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A. H. Vogl
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A. Lerchl
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A. Sommer
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Alexander Lerchl
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Anet Potgieter
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Angela M. Sommer
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2007 (22)
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Article (22)
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Fachbereich Elektrotechnik und Informationstechnik (22)
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Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
(2007)
Klaus Prume
;
Paul Muralt
;
Florian Calame
;
Thorsten Schmitz-Kempen
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