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Author
Helmut Alt
(5)
Franz Wosnitza
(1)
H. Wilson
(1)
Hans-Jürgen Hagemann
(1)
J. Warnier
(1)
P. Geittner
(1)
Thomas Siepmann
(1)
Udo Zastrow
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Year of publication
1986 (9)
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Article
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Book
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German
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English
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Fachbereich Elektrotechnik und Informationstechnik (9)
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PCVD at high deposition rates. Geittner, P.; Hagemann, H. J.; Warnier, J.; Wilson, H.
(1986)
Hans-Jürgen Hagemann
;
P. Geittner
;
J. Warnier
;
H. Wilson
2
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2