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W. Ehrfeld (4)
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1995 (4)
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Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.
(1995)
Klaus-Peter Kämper
;
J. Döpper
;
W. Ehrfeld
;
B. Hagemann
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