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W. Ehrfeld (4)
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1995 (4)
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Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Thürigen, C.
(1995)
Klaus-Peter Kämper
;
H. Lehr
;
S. Abel
;
W. Ehrfeld
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