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Holger Heuermann
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Ingrid Scholl
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Claudia Mayer
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Martin Wolf
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Christopher Schlick
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S. Simon
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Thomas Siepmann
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Klaus Spitzer
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B. Schiek
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G. Schuh
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Helmut Conradi
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J. Springer
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Marko Schuba
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Reinhard Kreutz
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S. Armbruster
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Abhijit Sovakar
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Bernd Girod
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Burkhard Schiek
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C. Scholz
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Christoph Palm
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Year of publication
1997 (34)
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Article
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German
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Fachbereich Elektrotechnik und Informationstechnik (34)
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15-term self-calibration methods for the error-correction of on-wafer measurements
(1997)
Holger Heuermann
;
B. Schiek
34
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34