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Heiko Iken (15)
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atomic layer deposition
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capacitive field-effect sensors
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ultrathin gate insulators
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Fachbereich Medizintechnik und Technomathematik (15)
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Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors
(2013)
Heiko Iken
;
K. Ahlborn
;
F. Gerlach
;
W. Vonau
;
W. Zander
;
J. Schubert
;
Michael Josef Schöning
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