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Author
Frank Hartung
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Klaus Prume
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Christoph Rihacek
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Markus Kampmann
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Michael Schnell
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Sinja Brandes
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Snjezana Gligorevic
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Alexander Ferrein
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Carl-Herbert Rokitansky
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Holger Heuermann
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Max Ehammer
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Miodrag Sajatovic
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Thomas Gräupl
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Uwe Horn
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Andreas Bitz
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Bianca Hagebeuker
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F. Calame
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F. Tyholdt
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Gerhard Lakemeyer
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H. Raeder
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Year of publication
2007 (28)
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Article
(21)
Conference Proceeding
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English (28)
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Fachbereich Elektrotechnik und Informationstechnik (28)
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Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
(2007)
Klaus Prume
;
Paul Muralt
;
Florian Calame
;
Thorsten Schmitz-Kempen
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