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Klaus Prume (18)
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Fachbereich Elektrotechnik und Informationstechnik (18)
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Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
(2007)
Klaus Prume
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H. Raeder
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F. Tyholdt
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W. E. Booij
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