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Thomas Ritz
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Klaus Prume
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Alexander Ferrein
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Andreas Roelofs
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Axel Busboom
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Bernd Reichenberg
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Christian Foltz
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2002 (12)
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Article (12)
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English (12)
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Fachbereich Elektrotechnik und Informationstechnik (12)
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Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations / Prume, Klaus ; Roelofs, Andreas ; Schmitz, Thorsten ; Reichenb
(2002)
Klaus Prume
;
Andreas Roelofs
;
Thorsten Schmitz
;
Bernd Reichenberg
8
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