Refine
Year of publication
- 2003 (7) (remove)
Institute
- Fachbereich Maschinenbau und Mechatronik (7) (remove)
Language
- English (7) (remove)
Document Type
- Article (5)
- Book (1)
- Conference Proceeding (1)
Keywords
- MST (1)
- Mikrosystemtechnik (1)
- VM (1)
- Virtuelle Maschine (1)
- virtual clean room (1)