High-rate sputtering of zinc oxide with a funnel-shaped magnetic field: Effect of the target thickness on the layer properties
| Author: | Andreas Mohnke |
|---|---|
| ISBN: | 0042-2266 |
| Parent Title (English): | Vakuum-Technik. 36 (1987), H. 5 |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 1987 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 148 |
| Last Page: | 151 |
| Note: | unter 63 ZS 073-1986/87 in der Bibliothek Jülich vorhanden |
| Institutes: | FH Aachen / Fachbereich Energietechnik |
