Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films / Gerber, P. ; Roelofs, A. ; Kügeler, C.; Böttger, U. ; Waser, R. ; Prume, K. ;
| Author: | Klaus Prume, P. Gerber, A. Roelofs, C. Kügeler |
|---|---|
| ISBN: | 0021-8979 |
| Parent Title (English): | Journal of Applied Physics . 96 (2004), H. 5 |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2004 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 2800 |
| Last Page: | 2804 |
| Link: | http://dx.doi.org/10.1063/1.1775306 |
| Zugriffsart: | campus |
| Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
