High resolution LAPS using amorphous silicon as the semiconductor material
Author: | W. Moritz, T. Yoshinobu, F. Finger, S. Krause, M. Martin-Fernandez, Michael Josef SchöningORCiD |
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ISBN: | 0925-4005 |
Parent Title (English): | Sensors and Actuators B. 103 (2004), H. 1-2 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2004 |
First Page: | 436 |
Last Page: | 444 |
Link: | http://dx.doi.org/10.1016/j.snb.2004.04.073 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |