15-term self-calibration methods for the error-correction of on-wafer measurements
Author: | Holger HeuermannORCiD, B. Schiek |
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ISBN: | 0018-9456 |
Parent Title (English): | IEEE transactions on instrumentation and measurement : IM / Institute of Electrical and Electronics Engineers, Instrumentation and Measurement Group. 46 (1997), H. 5 |
Document Type: | Article |
Language: | English |
Year of Completion: | 1997 |
First Page: | 1105 |
Last Page: | 1110 |
Link: | http://dx.doi.org/10.1109/19.676721 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |