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A silicon-based sensor array with capacitive EIS structures

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Author:Michael J. Schöning, B. Weidenbrück, M. Thust, P. Kordos, H. Lüth
Parent Title (English):Proceedings of the 11th European Conference on Solid-State Transducers / Eurosensors XI, September 21 - 24, 1997, Warsaw, Poland. [Organised by] Warsaw University of Technology. Vol 2.
Publisher:Sensor Lab Sp.
Place of publication:Warsaw
Document Type:Article
Year of Completion:1997
Date of the Publication (Server):2012/12/18
First Page:871
Last Page:874
Eurosensors ; (11, 1997, Warszawa) ; Eurosensors - European Conference on Solid-State Transducers ; (11 : ; 1997.09.21-24 : ; Warsaw)
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik