Layer Deposition I
Author: | Arnold Förster |
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ISBN: | 3-89336-319-X |
Opac Id: | 61 UIM 2 |
Parent Title (English): | Fundamentals of nanoelectronics / Stefan Blügel ... (ed.). - (Lecture manuscripts of the ... Spring School of the Department of Solid State Research ; 34). - (Schriften des Forschungszentrums Jülich : Materie und Material ; 14 ; 34) |
Publisher: | Forschungszentrum, Zentralbibliothek |
Place of publication: | Jülich |
Document Type: | Article |
Language: | English |
Year of Completion: | 2003 |
First Page: | C2.1 |
Last Page: | C2.13 |
Institutes: | FH Aachen / Fachbereich Energietechnik |