Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.
Author: | Klaus-Peter Kämper, M. Abraham, W. Ehrfeld, V. Hessel |
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ISBN: | 0167-9317 |
Parent Title (English): | Microelectronic Engineering. 41-42 (1998) |
Document Type: | Article |
Language: | English |
Year of Completion: | 1998 |
First Page: | 47 |
Last Page: | 52 |
Note: | International Conference on Micro- and Nanofarbication <Athens, Greece, 15 September - 18 September 1998> |
Link: | http://dx.doi.org/10.1016/S0167-9317(98)00011-2 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |