Micro- and nanopatterning of sensor chips by means of macroporous silicon.
Author: | A. Kurowski, J. Schultze, H. Lüth, Michael Josef SchöningORCiD |
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ISBN: | 0925-4005 |
Parent Title (English): | Sensors and Actuators B. 83 (2002), H. 1-3 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2002 |
First Page: | 123 |
Last Page: | 128 |
Note: | Selected Papers from TRANSDUCERS '01 EUROSENSORS XV |
Link: | http://dx.doi.org/10.1016/S0925-4005(01)01054-1 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |