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Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; Kämper, K.-P.; Schütze, A.; Wallach, D.; Walter, T.

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Metadaten
Author:Klaus-Peter Kämper, A. Picard, A. Schütze, D. Wallach
ISBN:0948-3128
Parent Title (English):Mst-News (2006)
Document Type:Article
Language:English
Year of Completion:2006
First Page:15, 16
Last Page:u. 35
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik