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Effect of O2 plasma on properties of electrolyte-insulator-semiconductor structures

  • Prior to immobilization of biomolecules or cells onto biosensor surfaces, the surface must be physically or chemically activated for further functionalization. Organosilanes are a versatile option as they facilitate the immobilization through their terminal groups and also display self-assembly. Incorporating hydroxyl groups is one of the important methods for primary immobilization. This can be done, for example, with oxygen plasma treatment. However, this treatment can affect the performance of the biosensors and this effect is not quite well understood for surface functionalization. In this work, the effect of O2 plasma treatment on EIS sensors was investigated by means of electrochemical characterizations: capacitance–voltage (C–V) and constant capacitance (ConCap) measurements. After O2 plasma treatment, the potential of the EIS sensor dramatically shifts to a more negative value. This was successfully reset by using an annealing process.

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Metadaten
Verfasserangaben:Julio Arreola, Michael Keusgen, Michael Josef SchöningORCiD
DOI:https://doi.org/10.1002/pssa.201700025
ISSN:1862-6319
Titel des übergeordneten Werkes (Englisch):physica status solidi a : applications and materials sciences
Verlag:Wiley-VCH
Verlagsort:Weinheim
Dokumentart:Wissenschaftlicher Artikel
Sprache:Englisch
Erscheinungsjahr:2017
Datum der Publikation (Server):21.08.2017
Freies Schlagwort / Tag:O2 plasma; annealing; electrolyte-insulator semiconductor sensor (EIS); hydroxylation; surface functionalization
Jahrgang:214
Umfang:Artikel 1700025
Link:https://doi.org/10.1002/pssa.201700025
Zugriffsart:campus
Fachbereiche und Einrichtungen:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien
collections:Verlag / Wiley-VCH