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Halbleiter-Schichtstrukturen mit porösem Silizium als Chemo- und Biosensoren

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Metadaten
Author:Michael Josef SchöningORCiD, M. Thust, P. Kordos, H. Lüth, F. Ronkel, J. W. Schultze
ISBN:0341-0196
Parent Title (German):ITG-Fachbericht. 148 (1998)
Document Type:Article
Language:German
Year of Completion:1998
First Page:33
Last Page:40
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik