Capacitive microsensors for biochemical sensing on porous silicon technology
Author: | Michael Josef SchöningORCiD, A. Kurowski, M. Thust, P. Kordos, J. W. Schultze, H. Lüth |
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ISBN: | 0925-4005 |
Parent Title (English): | Sensors and Actuators B. 64 (2000), H. 1-3 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2000 |
First Page: | 59 |
Last Page: | 64 |
Link: | http://dx.doi.org/10.1016/S0925-4005(99)00484-0 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |