A first step towards a microfabricated thin-film sensor array on the basis of chalcogenide glass materials
Author: | Michael Josef SchöningORCiD, Joachim P. Kloock, Y. Mourzina, J. Schubert |
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ISBN: | 1424-8220 |
Parent Title (English): | Sensors. 2 (2002), H. 9 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2002 |
First Page: | 356 |
Last Page: | 365 |
Link: | http://www.mdpi.net/sensors/papers/s20900356.pdf |
Zugriffsart: | weltweit |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |